Short wave infrared lamp for IC

Sat, 27 Jun 2026 05:26:48 +0800

On the fab floor, a 12-inch wafer sits, waiting for its photoresist bake. You know the stakes: a 1°C swing across the surface and you’re chasing linewidth control and yield. What you need is heat that hits fast, locks in, and doesn’t stir up a single particle. What matters, technically Our short wave infrared (SWIR) lamps put heat straight into the photoresist and substrate—no waiting around for convection. Peak emission in the SWIR band is tuned for strong absorption in organic films and silicon, so you can ramp to setpoint in under 30 seconds. Across the wafer, uniformity stays within ±0.1°C, and repeatability holds better than ±0.2°C from shift to shift. Cleanroom Class 1–100 stays intact. The quartz envelope and reflector geometry are built to keep particles out of the process, and the output stays stable over 5,000+ hours with less than 5% drop. Why it works in lithography In lithography, soft bake sets the solvent profile; hard bake locks the image. With SWIR, you get clean solvent removal without skinning the film, which cuts down standing waves and scumming. The response is fast, so idle time between loads shrinks and cycle time drops—without giving up critical dimension control. Heating is on-demand, not always-on, so energy use falls. The payoff is fewer rework lots, stable CD performance, and a thermal budget you can plan around. Here’s what to watch for Installation comes down to optical alignment and clearance. Get those wrong and you’ll see hot spots. SWIR intensity is high, so interlocks and shielding are non-negotiable for operator safety. The lamps fit standard semiconductor tool interfaces, but integration has to account for exhaust, cooling, and voltage stability. Keep those in line and temperature uniformity stays within spec.

Wave on The Infrared Heating Hub

Short wave infrared lamp for IC