Mattson RTP lamp replacement

Tue, 30 Jun 2026 17:32:45 +0800

On the fab floor, thermal drift doesn’t show up with a warning light. It shows up as yield loss and CD control that starts to wander. Mattson RTP lamp replacements are built to keep your drying and photoresist bake steps inside the thermal budget—where they need to be. What matters under the hood We run short-wave infrared halogen lamps with a quartz envelope, tuned for a fast ramp and a tight, repeatable steady state. That gives you wafer-level temperature uniformity of ±0.1°C across the process window, and soft bake / hard bake profiles that behave the same run after run. These lamps hold output steady over thousands of hours—we’ve got units running 5,000+ hours with less than 5% output drop. And because they don’t cough out particles when they cycle, cleanroom particle counts stay within Class 1–100 expectations. Why this plays in lithography On a litho line, you need a soft bake that reliably pulls solvent, and a hard bake that sets the photoresist without overshoot that pushes CD shift. These replacements deliver that repeatability, and they also support wafer drying where residual moisture has to come out quickly and evenly. The payoff is fewer scrap lots, less rework, and lower energy per batch thanks to efficient radiant coupling and fast settling. The field details that bite Installation is straightforward, but lamp orientation and reflector alignment have to be checked during the swap—misalignment can create localized hot spots and drift. Make sure the base connector, voltage, and cooling path match your chamber, and keep a schedule for optical inspections. Catching end-of-life early keeps process control out of trouble.

Mattson on The Infrared Heating Hub

Mattson RTP lamp replacement